METHOD OF MEASURING ACCURATE PARALLELISM

Details for Australian Patent Application No. 2003236107 (hide)

Owner SHENYANG INSTITUTE OF AUTOMATION OF THE CHINESE ACADEMY OF SCIENCES

Inventors ZHU, Feng; OU, Jinjun; DONG, Zaili; WANG, Jun; HAO, Yingming

Pub. Number AU-A-2003236107

PCT Number PCT/CN03/00245

PCT Pub. Number WO2004/081493

Priority 03111155.6 12.03.03 CN

Filing date 7 April 2003

Wipo publication date 30 September 2004

International Classifications

G01B 011/26 Measuring arrangements characterised by the use of optical means - for measuring angles or tapers

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

4 September 2003 Complete Application Filed

  Priority application(s): 03111155.6 12.03.03 CN

4 November 2004 Application Open to Public Inspection

  Published as AU-A-2003236107

1 December 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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