CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR INSPECTING SAMPLES

Details for Australian Patent Application No. 2003235507 (hide)

Owner APPLIED MATERIALS, INC.

Inventors ROSENBERG, Zvika; PETROV, Igor

Pub. Number AU-A-2003235507

PCT Number PCT/US03/15018

PCT Pub. Number WO2003/095997

Priority 10/146,218 13.05.02 US

Filing date 12 May 2003

Wipo publication date 11 November 2003

International Classifications

G01N 023/00 Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

Event Publications

4 September 2003 Complete Application Filed

  Priority application(s): 10/146,218 13.05.02 US

15 January 2004 Application Open to Public Inspection

  Published as AU-A-2003235507

27 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

18 August 2005 Corrigenda

  Applications OPI - Name Index Under the name APPLIED MATERIALS, INC., Application No. 2003235507, under INID (71) correct the name to read APPLIED MATERIALS ISRAEL, LTD.; APPLIED MATERIALS, INC.

10 December 2009 Corrigenda

  Applications OPI - Name Index Under the name Applied Materials Israel, Ltd. and Applied Materials, Inc., Application No. 2003235507, under INID(43) correct the publication date to read 24.11.2003

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