Process for producing oxide superconductive thin-film

Details for Australian Patent Application No. 2003235235 (hide)

Owner Sumitomo Electric Industries, Ltd.

Inventors Hahakura, Shuji; Ohmatsu, Kazuya

Agent Davies Collison Cave

Pub. Number AU-B-2003235235

PCT Number PCT/JP03/04932

PCT Pub. Number WO2003/091157

Priority 2002-125380 26.04.02 JP

Filing date 17 April 2003

Wipo publication date 10 November 2003

Acceptance publication date 25 October 2007

International Classifications

C23C 14/08 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Oxides

C23C 14/28 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by wave energy or particle radiation

H01L 39/24 (2006.01) Devices using superconductivity or hyperconductivity - Processes or apparatus specially adapted for the manufacture or treatment of devices provided for in group or of parts thereof

C23C 14/22 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the process of coating

Event Publications

4 September 2003 Complete Application Filed

  Priority application(s): 2002-125380 26.04.02 JP

18 December 2003 Application Open to Public Inspection

  Published as AU-B-2003235235

25 October 2007 Application Accepted

  Published as AU-B-2003235235

21 February 2008 Standard Patent Sealed

11 November 2010 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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