METHOD FOR REMOVING PHOTORESIST

Details for Australian Patent Application No. 2003235130 (hide)

Owner TOKYO OHKA KOGYO CO., LTD.

Inventors YOKOI, Shigeru; WAKIYA, Kazumasa; HARAGUCHI, Takayuki

Pub. Number AU-A-2003235130

PCT Number PCT/JP03/05336

PCT Pub. Number WO2003/091806

Priority 2002-125471 26.04.02 JP; 2002-308993 23.10.02 JP

Filing date 25 April 2003

Wipo publication date 10 November 2003

International Classifications

G03F 007/42 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Stripping or agents therefor

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

4 September 2003 Complete Application Filed

  Priority application(s): 2002-125471 26.04.02 JP; 2002-308993 23.10.02 JP

18 December 2003 Application Open to Public Inspection

  Published as AU-A-2003235130

20 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003235131-MAGNETIC FIELD GENERATOR, MAGNETO-OPTICAL INFORMATION STORAGE SYSTEM, AND MAGNETOOPTICAL INFORMATION STORAGE DEVICE

2003235129-PROCESS FOR PREPARATION OF 2-AMINOKETONES