PLASMA-ASSISTED DOPING

Details for Australian Patent Application No. 2003234499 (hide)

Owner DANA CORPORATION

Inventors KUMAR, Satyendra; KUMAR, Devendra

Pub. Number AU-A-2003234499

PCT Number PCT/US03/14130

PCT Pub. Number WO2003/095591

Priority 60/378,693 08.05.02 US; 60/430,677 04.12.02 US; 60/435,278 23.12.02 US

Filing date 7 May 2003

Wipo publication date 11 November 2003

International Classifications

C10G 015/00 Cracking of hydrocarbon oils by electric means, electromagnetic or mechanical vibrations, by particle radiation or with gases superheated in electric arcs

H01L 021/84 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B05D 005/12 Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures - to obtain a coating with specific electrical properties

B05D 003/06 Pretreatment of surfaces to which liquids or other fluent materials are to be applied - by exposure to radiation

C10G 011/02 Catalytic cracking, in the absence of hydrogen, of hydrocarbon oils

C23F 001/02 Etching metallic material by chemical means - Local etching

C09K 011/07 Luminescent, e.g. electroluminescent, chemiluminescent, materials - having chemically-interreactive components, e.g. reactive chemiluminescent compositions

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 60/378,693 08.05.02 US; 60/430,677 04.12.02 US; 60/435,278 23.12.02 US

15 January 2004 Application Open to Public Inspection

  Published as AU-A-2003234499

27 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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