POLISHING PAD WITH OPTICAL SENSOR

Details for Australian Patent Application No. 2003234417 (hide)

Owner STRASBAUGH

Inventors BARBOUR, Greg

Pub. Number AU-A-2003234417

PCT Number PCT/US03/14950

PCT Pub. Number WO2003/097300

Priority 10/146,494 14.05.02 US

Filing date 12 May 2003

Wipo publication date 2 December 2003

International Classifications

B24B 049/00 Measuring

B24B 001/00

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 10/146,494 14.05.02 US

29 January 2004 Application Open to Public Inspection

  Published as AU-A-2003234417

3 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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