COMPENSATION FOR GEOMETRIC EFFECTS OF BEAM MISALIGN- MENTS IN PLANE MIRROR INTERFEROMETERS

Details for Australian Patent Application No. 2003234413 (hide)

Owner ZYGO CORPORATION

Inventors HILL, Henry, A.

Pub. Number AU-A-2003234413

PCT Number PCT/US03/14915

PCT Pub. Number WO2003/095940

Priority 60/378,004 13.05.02 US

Filing date 13 May 2003

Wipo publication date 11 November 2003

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 60/378,004 13.05.02 US

15 January 2004 Application Open to Public Inspection

  Published as AU-A-2003234413

27 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

10 December 2009 Corrigenda

  Applications OPI - Name Index Under the name Zygo Corporation, Application No. 2003234413, under INID(43) correct the publication date to read 24.11.2003

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