SYSTEM AND METHOD FOR CONTROLLING WAFER TEMPERATURE
Details for Australian Patent Application No. 2003234284 (hide)
International Classifications
Event Publications
28 August 2003 Complete Application Filed
Priority application(s): 10/142,178 09.05.02 US
15 January 2004 Application Open to Public Inspection
Published as AU-A-2003234284
27 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
10 December 2009 Corrigenda
Applications OPI - Name Index Under the name Lockheed Martin Corporation, Application No. 2003234284, under INID (43) correct the publication date to read 24.11.2003
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