METHOD AND DEVICE FOR PLASMA TREATING WORKPIECES

Details for Australian Patent Application No. 2003233770 (hide)

Owner SIG TECHNOLOGY LTD.

Inventors MULLER, Hartwig; VOGEL, Klaus; ARNOLD, Gregor; BEHLE, Stephan; LUTTRINGHAUS-HENKEL, Andreas; BICKER, Matthias; KLEIN, Jurgen; LITZENBERG, Michael; LEWIN, Frank

Pub. Number AU-A-2003233770

PCT Number PCT/DE03/01501

PCT Pub. Number WO2003/100115

Priority 102 23 288.1 24.05.02 DE; 102 24 395.6 01.06.02 DE

Filing date 9 May 2003

Wipo publication date 12 December 2003

International Classifications

C23C 016/04 Chemical deposition or plating by decomposition - Coating on selected surface areas, e.g. using masks

C23C 016/50 Chemical deposition or plating by decomposition - using electric discharges

B05D 007/24 Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials - for applying particular liquids or other fluent materials

C03C 017/00 Surface treatment of glass, e.g. of devitrified glass, not in the form of fibres or filaments, by coating

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 102 23 288.1 24.05.02 DE; 102 24 395.6 01.06.02 DE

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003233770

10 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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