MULTI-PART ELECTRODE FOR A SEMICONDUCTOR PROCESSING PLASMA REACTOR AND METHOD OF REPLACING A PORTION OF A MUTLI-PART ELECTRODE

Details for Australian Patent Application No. 2003233655 (hide)

Owner LAM RESEARCH CORPORATION

Inventors KENNEDY, William, S.; LOEWENHARDT, Peter; TRUSSELL, David; FISCHER, Andreas

Pub. Number AU-A-2003233655

PCT Number PCT/US03/16318

PCT Pub. Number WO2003/100817

Priority 60/383,164 23.05.02 US

Filing date 23 May 2003

Wipo publication date 12 December 2003

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 60/383,164 23.05.02 US

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003233655

10 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003233656-Conducting polymer-grafted carbon material for fuel cell applications

2003233654-WEB BROWSER COMMUNICATION