IN-SITU THERMAL CHAMBER CLEANING

Details for Australian Patent Application No. 2003233506 (hide)

Owner ASML US, INC.

Inventors SENZAKI, Yoshihide; HERRING, Robert, B.; SISSON, Joseph, C.

Pub. Number AU-A-2003233506

PCT Number PCT/US03/14562

PCT Pub. Number WO2003/095239

Priority 60/379,381 08.05.02 US; 10/318,664 12.12.02 US

Filing date 8 May 2003

Wipo publication date 11 November 2003

International Classifications

B44C 001/22 Processes, not specifically provided for elsewhere, for producing decorative surface effects - Removing surface-material, e.g. by engraving, by etching

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C03C 015/00 Surface treatment of glass

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 60/379,381 08.05.02 US; 10/318,664 12.12.02 US

15 January 2004 Application Open to Public Inspection

  Published as AU-A-2003233506

27 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

10 December 2009 Corrigenda

  Applications OPI - Name Index Under the name ASML US, Inc. , Application No. 2003233506 , under INID (43) correct the publication date to read 24.11.2003

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