PROCESS FOR MAKING AIR GAP CONTAINING SEMICONDUCTING DEVICES AND RESULTING SEMICONDUCTING DEVICE

Details for Australian Patent Application No. 2003233470 (hide)

Owner DOW GLOBAL TECHNOLOGIES INC.

Inventors TOWNSEND, Paul, H., III; FOSTER, Kenneth, L.

Pub. Number AU-A-2003233470

PCT Number PCT/US03/09956

PCT Pub. Number WO2003/085719

Priority 60/369,490 02.04.02 US

Filing date 1 April 2003

Wipo publication date 20 October 2003

International Classifications

H01L 021/312 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/532 Details of semiconductor or other solid state devices

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 60/369,490 02.04.02 US

27 November 2003 Application Open to Public Inspection

  Published as AU-A-2003233470

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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