OPTICAL MEASURING DEVICE AND OPERATING METHOD FOR AN OPTICAL IMAGING SYSTEM

Details for Australian Patent Application No. 2003233318 (hide)

Owner CARL ZEISS SMT AG

Inventors EMER, Wolfgang; WEGMANN, Ulrich; SCHRIEVER, Martin; HOCH, Rainer

Pub. Number AU-A-2003233318

PCT Number PCT/EP03/04932

PCT Pub. Number WO2004/099877

Filing date 12 May 2003

Wipo publication date 26 November 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G01M 011/02 Testing of optical apparatus - Testing of optical properties

Event Publications

28 August 2003 Complete Application Filed

6 January 2005 Application Open to Public Inspection

  Published as AU-A-2003233318

2 February 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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