BAFFLE PLATE AND PLASMA ETCH- ING DEVICE HAVING SAME

Details for Australian Patent Application No. 2003232645 (hide)

Owner TOKYO ELECTRON KOREA LTD.

Inventors MOON, Young Jae; LEE, Jeung Woo; KIM, Moon Hwan

Pub. Number AU-A-2003232645

PCT Number PCT/KR03/01006

PCT Pub. Number WO2003/098669

Priority 10-2002-0028360 22.05.02 KR

Filing date 22 May 2003

Wipo publication date 2 December 2003

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 10-2002-0028360 22.05.02 KR

29 January 2004 Application Open to Public Inspection

  Published as AU-A-2003232645

10 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003232646-HEATING SYSTEM AND EXCHANGING DEVICE OF DUAL HEATER

2003232644-ELBOW FOR HOT WATER AND COLD WATER PIPING