METHOD FOR PROCESSING ELECTRICAL COMPONENTS, ESPECIALLY SEMICONDUCTOR CHIPS, AND DEVICE FOR CARRYING OUT THE METHOD

Details for Australian Patent Application No. 2003232588 (hide)

Owner SILLNER, Georg, Rudolf

Inventors SILLNER, Georg, Rudolf

Pub. Number AU-A-2003232588

PCT Number PCT/DE03/01058

PCT Pub. Number WO2003/085702

Priority 102 14 969.0 04.04.02 DE; 102 18 384.8 24.04.02 DE; 102 25 097.9 05.06.02 DE

Filing date 2 April 2003

Wipo publication date 20 October 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 102 14 969.0 04.04.02 DE; 102 18 384.8 24.04.02 DE; 102 25 097.9 05.06.02 DE

27 November 2003 Application Open to Public Inspection

  Published as AU-A-2003232588

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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