METHOD FOR THE PRODUCTION OF STRUCTURED LAYERS ON SUBSTRATES

Details for Australian Patent Application No. 2003232469 (hide)

Owner CARL-ZEISS-STIFTUNG TRADING AS SCHOTT GLAS

Inventors LEIB, Jurgen; BIECK, Florian; MUND, Dietrich

Pub. Number AU-A-2003232469

PCT Number PCT/EP03/03884

PCT Pub. Number WO2003/088340

Priority 202 05 830.1 15.04.02 DE; 102 22 958.9 23.05.02 DE; 102 22 964.3 23.05.02 DE; 102 22 609.1 23.05.02 DE; 102 52 787.3 13.11.02 DE; 103 01 559.0 16.01.03 DE

Filing date 15 April 2003

Wipo publication date 27 October 2003

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 202 05 830.1 15.04.02 DE; 102 22 958.9 23.05.02 DE; 102 22 964.3 23.05.02 DE; 102 22 609.1 23.05.02 DE; 102 52 787.3 13.11.02 DE; 103 01 559.0 16.01.03 DE

4 December 2003 Application Open to Public Inspection

  Published as AU-A-2003232469

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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