SPUTTER METHOD OR DEVICE FOR THE PRODUCTION OF NATURAL VOLTAGE OPTIMIZED COATINGS

Details for Australian Patent Application No. 2003232242 (hide)

Owner UNAXIS BALZERS AKTIENGESELLSCHAFT

Inventors HAAG, Walter

Pub. Number AU-A-2003232242

PCT Number PCT/EP03/04572

PCT Pub. Number WO2003/097896

Priority 102 22 909.0 22.05.02 DE

Filing date 30 April 2003

Wipo publication date 2 December 2003

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 102 22 909.0 22.05.02 DE

29 January 2004 Application Open to Public Inspection

  Published as AU-A-2003232242

10 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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