METHOD OF FORMING A RIM PHASE SHIFTING MASK AND USING THE RIM PHASE SHIFTING MASK TO FORM A SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2003232155 (hide)

Owner MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE

Inventors NORDQUIST, Kevin, J.; DAUKSHER, William, J.; GARZA, Cesar, M.; WU, Wei, E.; ROMAN, Bernard, J.; MANGAT, Panwitter, J. S.

Pub. Number AU-A-2003232155

PCT Number PCT/US03/15590

PCT Pub. Number WO2004/013694

Priority 10/213,344 06.08.02 US

Filing date 15 May 2003

Wipo publication date 23 February 2004

International Classifications

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

G03F 007/09 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - characterised by structural details, e.g. supports, auxiliary layers

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 10/213,344 06.08.02 US

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003232155

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003232156-USE OF A SUBSCRIBER IDENTITY MODULE BY SEVERAL MOBILE COMMUNICATION DEVICES

2003232154-METHOD, PROCESSOR AND COMPUTED TOMOGRAPHY (CT) MACHINE FOR GENERATING IMAGES UTILIZING HIGH AND LOW SENSITIVITY DATA COLLECTED FROM A FLAT PANEL DETECTOR HAVING AN EXTENDED DYNAMIC RANGE