INTEGRATED STEPWISE STATISTICAL PROCESS CONTROL IN A PLASMA PROCESSING SYSTEM

Details for Australian Patent Application No. 2003232088 (hide)

Owner LAM RESEARCH CORPORATION

Inventors HUANG, Chung-Ho; JENSEN, John, A.

Pub. Number AU-A-2003232088

PCT Number PCT/US03/14474

PCT Pub. Number WO2003/105215

Priority 10/165,511 07.06.02 US

Filing date 6 May 2003

Wipo publication date 22 December 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 10/165,511 07.06.02 US

19 February 2004 Application Open to Public Inspection

  Published as AU-A-2003232088

24 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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