PLASMA CONTROL USING PHASE AND/OR FREQUENCY OF MULTIPLE RADIATION SOURCES

Details for Australian Patent Application No. 2003232065 (hide)

International Classifications

Event Publications

28 August 2003 Complete Application Filed

Priority application(s): 60/378,693 08.05.02 US; 60/430,667 04.12.02 US; 60/435,278 23.12.02 US

15 January 2004 Application Open to Public Inspection

Published as AU-A-2003232065

27 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

10 December 2009 Corrigenda

Applications OPI - Name Index Under the name Dana Corporation, Application No. 2003232065, under INID (43) correct the publication date to read 24.11.2003

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