A METHOD FOR MAKING A SEMICONDUCTOR DEVICE HAVING A HIGH-K GATE DIELECTRIC

Details for Australian Patent Application No. 2003231821 (hide)

Owner INTEL CORPORATION

Inventors CHAU, Robert; ARGHAVANI, Reza

Pub. Number AU-A-2003231821

PCT Number PCT/US03/16307

PCT Pub. Number WO2003/103032

Priority 10/159,520 31.05.02 US

Filing date 22 May 2003

Wipo publication date 19 December 2003

International Classifications

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 10/159,520 31.05.02 US

12 February 2004 Application Open to Public Inspection

  Published as AU-A-2003231821

17 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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