MOUNTING METHOD AND MOUNTING SYSTEM

Details for Australian Patent Application No. 2003231385 (hide)

Owner TORAY ENGINEERING CO., LTD.

Inventors YAMAUCHI, Akira; NARABA, Satoru

Pub. Number AU-A-2003231385

PCT Number PCT/JP03/05121

PCT Pub. Number WO2003/092054

Priority 2002-125816 26.04.02 JP; 2003-66586 12.03.03 JP

Filing date 22 April 2003

Wipo publication date 10 November 2003

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/60 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 2002-125816 26.04.02 JP; 2003-66586 12.03.03 JP

18 December 2003 Application Open to Public Inspection

  Published as AU-A-2003231385

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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