METHOD OF PRODUCING AN SOI WAFER

Details for Australian Patent Application No. 2003231271 (hide)

Owner SEH AMERICA, INC.

Inventors KOVESHNIKOV, Sergei, V.

Pub. Number AU-A-2003231271

PCT Number PCT/US03/13809

PCT Pub. Number WO2004/003996

Priority 10/186,942 28.06.02 US

Filing date 2 May 2003

Wipo publication date 19 January 2004

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/324 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 10/186,942 28.06.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003231271

17 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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