ANTIREFLECTIVE SIO-CONTAINING COMPOSITIONS FOR HARDMASK LAYER

Details for Australian Patent Application No. 2003230825 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors ANGELOPOULOS, Marie; BABICH, Katherina; BROCK, Phillip; HUANG, Wu-Song; MAHOROWALA, Arpan, P.; MEDEIROS, David, R.; SOORIYAKUMARAN, Ratnam; PFEIFFER, Dirk

Pub. Number AU-A-2003230825

PCT Number PCT/US03/10590

PCT Pub. Number WO2003/089992

Priority 10/124,087 16.04.02 US

Filing date 1 April 2003

Wipo publication date 3 November 2003

International Classifications

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

G03F 007/004 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Photosensitive materials

G03F 007/09 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - characterised by structural details, e.g. supports, auxiliary layers

G03F 007/26 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Processing photosensitive materials

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 10/124,087 16.04.02 US

11 December 2003 Application Open to Public Inspection

  Published as AU-A-2003230825

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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