SPUTTERING APPARATUS COMPRISING A CONCAVE CATHODE BODY

Details for Australian Patent Application No. 2003230745 (hide)

Owner ISOFLUX, INC.

Inventors GLOCKER, David, A.; ROMACH, Mark

Pub. Number AU-A-2003230745

PCT Number PCT/US03/09390

PCT Pub. Number WO2003/083161

Priority 60/368,105 27.03.02 US

Filing date 27 March 2003

Wipo publication date 13 October 2003

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 60/368,105 27.03.02 US

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003230745

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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