LASER ASSISTED DIRECT IMPRINT LITHOGRAPHY

Details for Australian Patent Application No. 2003230676 (hide)

Owner PRINCETON UNIVERSITY

Inventors CHOU, Stephen, Y.

Pub. Number AU-A-2003230676

PCT Number PCT/US03/08293

PCT Pub. Number WO2003/079416

Priority 60/364,653 15.03.02 US; 10/140,140 07.05.02 US

Filing date 17 March 2003

Wipo publication date 29 September 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 60/364,653 15.03.02 US; 10/140,140 07.05.02 US

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2003230676

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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