FABRICATION OF ELECTRONIC, MAGNETIC, OPTICAL, CHEMICAL, AND MECHANICAL SYSTEMS USING CHEMICAL ENDPOINT DETECTION

Details for Australian Patent Application No. 2003230268 (hide)

Owner THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventors PETERSON, Jeffrey; HUNT, Charles

Pub. Number AU-A-2003230268

PCT Number PCT/US03/14126

PCT Pub. Number WO2003/097902

Priority 10/146,279 15.05.02 US

Filing date 1 May 2003

Wipo publication date 2 December 2003

International Classifications

C23F 001/00 Etching metallic material by chemical means

C25F 003/00 Electrolytic etching or polishing

C03C 015/00 Surface treatment of glass

C03C 025/68 Surface treatment of fibres or filaments from glass, minerals, or slags - by etching

B44C 001/22 Processes, not specifically provided for elsewhere, for producing decorative surface effects - Removing surface-material, e.g. by engraving, by etching

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 10/146,279 15.05.02 US

29 January 2004 Application Open to Public Inspection

  Published as AU-A-2003230268

3 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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