PROJECTION OPTICAL SYSTEM

Details for Australian Patent Application No. 2003229725 (hide)

Owner CARL ZEISS SMT AG

Inventors FEHR, Jean-Noel; MANN, Hans-Jurgen; ZELLNER, Johannes

Pub. Number AU-A-2003229725

PCT Number PCT/EP03/04245

PCT Pub. Number WO2004/095137

Filing date 24 April 2003

Wipo publication date 19 November 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 017/06 Systems with reflecting surfaces, with or without refracting elements

Event Publications

14 August 2003 Complete Application Filed

16 December 2004 Application Open to Public Inspection

  Published as AU-A-2003229725

12 January 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003229726-METHOD FOR PRODUCING ALKOXYLATED PRODUCTS AT OPTIMIZED REACTION PRESSURES

2003229724-Novel use of guanylate cyclase activators for the treatment of respiratory insufficiency