OPTICAL SYSTEM, METHOD OF ALTERING RETARDANCES THEREIN AND PHOTOLITHOGRAPHY TOOL

Details for Australian Patent Application No. 2003229692 (hide)

Owner CARL ZEISS SMT AG

Inventors KAMENOV, Vladimir; GRUNER, Toralf

Pub. Number AU-A-2003229692

PCT Number PCT/EP03/04015

PCT Pub. Number WO2004/092842

Filing date 17 April 2003

Wipo publication date 4 November 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02F 001/00 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating

Event Publications

14 August 2003 Complete Application Filed

9 December 2004 Application Open to Public Inspection

  Published as AU-A-2003229692

12 January 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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