PLANETARY MAGNETRON

Details for Australian Patent Application No. 2003229318 (hide)

Owner APPLIED MATERIALS, INC.

Inventors LUBBEN, Daniel, C.; DING, Peijun; MAITY, Nirmalya; HONG, Ilyoung, Richard; TSUNG, James, H.; MILLER, Michael, Andrew

Pub. Number AU-A-2003229318

PCT Number PCT/US03/15620

PCT Pub. Number WO2003/100819

Priority 10/152,494 21.05.02 US; 60/441,866 22.01.03 US; 10/418,710 17.04.03 US

Filing date 16 May 2003

Wipo publication date 12 December 2003

International Classifications

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 10/152,494 21.05.02 US; 60/441,866 22.01.03 US; 10/418,710 17.04.03 US

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003229318

10 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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