Owner Gallium Enterprises Pty Ltd

Inventors Tansley, Trevor Lionel; Butcher, Kenneth Scott Alexander

Agent Spruson & Ferguson

Pub. Number AU-B-2003229094

PCT Number PCT/AU03/00598

PCT Pub. Number WO2003/097532

Priority PS 2404 17.05.02 AU

Filing date 19 May 2003

Wipo publication date 2 December 2003

Acceptance publication date 26 February 2009

C01B 21/06 (2006.01) Nitrogen

C01G 15/00 (2006.01) Compounds of gallium, indium, or thallium

C23C 16/02 (2006.01) Chemical deposition or plating by decomposition - Pretreatment of the material to be coated

C23C 16/30 (2006.01) Chemical deposition or plating by decomposition - Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides

C23C 16/34 (2006.01) Chemical deposition or plating by decomposition - Nitrides

C30B 25/02 (2006.01) Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Epitaxial-layer growth

C30B 25/10 (2006.01) Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Heating of the reaction chamber or the substrate

C30B 29/40 (2006.01) Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

C30B 33/02 (2006.01) After-treatment of single crystals or homogeneous polycrystalline material with defined structure

H01L 21/205 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof