LOW TEMPERATURE PLASMA SI OR SIGE FOR MEMS APPLICATIONS

Details for Australian Patent Application No. 2003229041 (hide)

Owner MOTOROLA, INC.

Inventors FOERSTNER, Juergen, A.; SMITH, Steven, M.; ROOP, Raymond, Mervin

Pub. Number AU-A-2003229041

PCT Number PCT/US03/14930

PCT Pub. Number WO2004/013039

Priority 10/210,315 01.08.02 US

Filing date 13 May 2003

Wipo publication date 23 February 2004

International Classifications

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 10/210,315 01.08.02 US

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003229041

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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