IMPROVED PLATEN FOR ELECTROSTATIC WAFER CLAMPING APPARATUS

Details for Australian Patent Application No. 2003228776 (hide)

Owner TREK, INC.

Inventors OKUHARA, Yoshiki; AOKI, Shoji; KAWASHIMA, Naoki; WILLIAMS, Bruce, T.; UEHARA, Toshio; YANAGIDA, Hiroaki; MATSUBARA, Hideaki

Pub. Number AU-A-2003228776

PCT Number PCT/US03/13459

PCT Pub. Number WO2003/094335

Priority 10/137,790 01.05.02 US

Filing date 30 April 2003

Wipo publication date 17 November 2003

International Classifications

H02N 013/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 10/137,790 01.05.02 US

8 January 2004 Application Open to Public Inspection

  Published as AU-A-2003228776

20 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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