IMPROVEMENT IN PROCESS CONTROL FOR ETCH PROCESSES

Details for Australian Patent Application No. 2003228646 (hide)

Owner THE BOC GROUP INC.

Inventors REEVE, David, Robert; BODGER, Michael, D.; HALBROOK, Mark, Burton; HEASON, David

Pub. Number AU-A-2003228646

PCT Number PCT/US03/12462

PCT Pub. Number WO2003/092049

Priority 0209338.3 23.04.02 GB; 0214709.8 26.06.02 GB

Filing date 23 April 2003

Wipo publication date 10 November 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 0209338.3 23.04.02 GB; 0214709.8 26.06.02 GB

18 December 2003 Application Open to Public Inspection

  Published as AU-A-2003228646

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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