APPARATUS FOR DEPOSITING A MULTILAYER COATING ON DISCRETE SHEETS

Details for Australian Patent Application No. 2003228522 (hide)

Owner VITEX SYSTEMS, INC.

Inventors NELSON, Kenneth, Jeffrey; BURROWS, Paul, E.; GROSS, Mark, Edward; ZUMHOFF, Mac, R.; MARTIN, Peter, Maclyn; BONHAM, Charles, C.; GRAFF, Gordon, Lee; PAGANO, John, Chris

Pub. Number AU-A-2003228522

PCT Number PCT/US03/11480

PCT Pub. Number WO2003/090260

Priority 60/372,559 15.04.02 US; 10/412,133 11.04.03 US

Filing date 14 April 2003

Wipo publication date 3 November 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 60/372,559 15.04.02 US; 10/412,133 11.04.03 US

11 December 2003 Application Open to Public Inspection

  Published as AU-A-2003228522

6 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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