FIELD-ASSISTED FUSION BONDING

Details for Australian Patent Application No. 2003228364 (hide)

Owner NORTHROP GRUMMAN CORPORATION

Inventors STEWART, Robert, E.

Pub. Number AU-A-2003228364

PCT Number PCT/US03/09169

PCT Pub. Number WO2003/083912

Priority 10/106,156 26.03.02 US

Filing date 25 March 2003

Wipo publication date 13 October 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 10/106,156 26.03.02 US

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003228364

6 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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