AN IMPROVED SUBSTRATE HOLDER FOR PLASMA PROCESSING

Details for Australian Patent Application No. 2003228226 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors CHEN, Lee

Pub. Number AU-A-2003228226

PCT Number PCT/US03/06154

PCT Pub. Number WO2003/079404

Priority 60/363,284 12.03.02 US

Filing date 11 March 2003

Wipo publication date 29 September 2003

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 60/363,284 12.03.02 US

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2003228226

6 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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