MICROPOROUS POLISHING PAD

Details for Australian Patent Application No. 2003228036 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors PRASAD, Abaneshwar

Pub. Number AU-A-2003228036

PCT Number PCT/IB03/02123

PCT Pub. Number WO2003/099518

Priority 10/281,782 28.10.02 US; 60/382,739 23.05.02 US

Filing date 21 May 2003

Wipo publication date 12 December 2003

International Classifications

B24D 003/32 Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature

B24D 011/00 Constructional features of flexible abrasive materials

B24D 018/00 Manufacture of grinding tools, e.g. wheels, not otherwise provided for

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 10/281,782 28.10.02 US; 60/382,739 23.05.02 US

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003228036

10 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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