LIGHTING SYSTEM, PARTICULARLY FOR USE IN EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY

Details for Australian Patent Application No. 2003227574 (hide)

Owner CARL ZEISS SMT AG

Inventors MELZER, Frank; SINGER, Wolfgang

Pub. Number AU-A-2003227574

PCT Number PCT/EP03/03616

PCT Pub. Number WO2003/093902

Priority 102 19 514.5 30.04.02 DE

Filing date 8 April 2003

Wipo publication date 17 November 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 102 19 514.5 30.04.02 DE

8 January 2004 Application Open to Public Inspection

  Published as AU-A-2003227574

20 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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