METHOD AND DEVICE FOR MEASURING TEMPERATURE OF BASE MATERIAL

Details for Australian Patent Application No. 2003227509 (hide)

Owner TOKYO ELECTRON LIMITED ITO, Masafumi

Inventors ITO, Masafumi; SHIINA, Tatsuo; OKAMURA, Yasuyuki; ISHII, Nobuo

Pub. Number AU-A-2003227509

PCT Number PCT/JP03/04792

PCT Pub. Number WO2003/087744

Priority 2002-112733 15.04.02 JP

Filing date 15 April 2003

Wipo publication date 27 October 2003

International Classifications

G01J 005/08 Radiation pyrometry - Optical features

H01L 021/324 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G01K 011/12 Measuring temperature based on physical or chemical changes not covered by group , , , or

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 2002-112733 15.04.02 JP

4 December 2003 Application Open to Public Inspection

  Published as AU-A-2003227509

6 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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