POLISHING METHOD

Details for Australian Patent Application No. 2003227414 (hide)

Owner EBARA CORPORATION

Inventors FUKUSHIMA, Makoto; SAKURAI, Kunihiko; YOSHIDA, Hiroshi; NABEYA, Osamu; ICHIMURA, Teruhiko; TOGAWA, Tetsuji

Pub. Number AU-A-2003227414

PCT Number PCT/JP03/04894

PCT Pub. Number WO2003/086706

Priority 2002-116721 18.04.02 JP

Filing date 17 April 2003

Wipo publication date 27 October 2003

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 2002-116721 18.04.02 JP

4 December 2003 Application Open to Public Inspection

  Published as AU-A-2003227414

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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