PROCESSOR

Details for Australian Patent Application No. 2003227209 (hide)

Owner HORI, Masaru TOKYO ELECTRON LIMITED GOTO, Toshio

Inventors HORI, Masaru; GOTO, Toshio; ISHII, Nobuo

Pub. Number AU-A-2003227209

PCT Number PCT/JP03/03714

PCT Pub. Number WO2004/085704

Filing date 26 March 2003

Wipo publication date 18 October 2004

International Classifications

H05H 001/00 Generating plasma

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/52 Chemical deposition or plating by decomposition - Controlling or regulating the coating process

Event Publications

7 August 2003 Complete Application Filed

18 November 2004 Application Open to Public Inspection

  Published as AU-A-2003227209

15 December 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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