USE OF LIGHT EMITTING CHEMICAL REACTIONS FOR CONTROL OF SEMICONDUCTOR PRODUCTION PROCESSES

Details for Australian Patent Application No. 2003226491 (hide)

Owner THE BOC GROUP PLC

Inventors GRANT, Robert, Bruce; HOLBROOK, Mark, Burton; REEVE, David, Robert

Pub. Number AU-A-2003226491

PCT Number PCT/GB03/01104

PCT Pub. Number WO2003/079411

Priority 0206158.8 15.03.02 GB

Filing date 14 March 2003

Wipo publication date 29 September 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 0206158.8 15.03.02 GB

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2003226491

23 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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