ELECTROPOLISHING AND/OR ELECTROPLATING APPARATUS AND METHODS

Details for Australian Patent Application No. 2003226319 (hide)

Owner ACM RESEARCH, INC.

Inventors AFNAN, Muhammed; CHOKSHI, Himanshu, J.; VAN KERKWYK, Mark, Jacobus; KOEHLER, Damon, L.; YIH, Peihaur; NGUYEN, My, Hoang; CHANG, Ru, Kao; HO, Frederick; WANG, Hui; NUCH, Voha; GUTMAN, Felix

Pub. Number AU-A-2003226319

PCT Number PCT/US03/10725

PCT Pub. Number WO2003/087436

Priority 60/370,929 08.04.02 US; 60/370,956 08.04.02 US; 60/370,955 08.04.02 US; 60/370,919 08.04.02 US; 60/372,542 14.04.02 US; 60/372,567 14.04.02 US; 60/372,566 14.04.02 US; 60/390,460 21.06.02 US

Filing date 8 April 2003

Wipo publication date 27 October 2003

International Classifications

C25D 005/48 Electroplating characterised by the process - After-treatment of electroplated surfaces

C25D 017/00 Constructional parts, or assemblies thereof, of cells for electrolytic coating

C25D 007/12 Electroplating characterised by the article coated - Semiconductors

C25F 003/30 Electrolytic etching or polishing

C25F 007/00 Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 60/370,929 08.04.02 US; 60/370,956 08.04.02 US; 60/370,955 08.04.02 US; 60/370,919 08.04.02 US; 60/372,542 14.04.02 US; 60/372,567 14.04.02 US; 60/372,566 14.04.02 US; 60/390,460 21.06.02 US

4 December 2003 Application Open to Public Inspection

  Published as AU-A-2003226319

23 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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