MICROELECTROMECHANICAL SENSORS HAVING REDUCED SIGNAL BIAS ERRORS AND METHODS OF MANUFACTURING THE SAME

Details for Australian Patent Application No. 2003226083 (hide)

Owner THE CHARLES STARK DRAPER LABORATORY, INC.

Inventors BORENSTEIN, Jeffrey, T.; LENTO, Christopher, M.; WARD, Paul, A.

Pub. Number AU-A-2003226083

PCT Number PCT/US03/09372

PCT Pub. Number WO2003/083492

Priority 60/367,542 26.03.02 US

Filing date 26 March 2003

Wipo publication date 13 October 2003

International Classifications

G01P 015/08 Measuring acceleration - with conversion into electric or magnetic values

G01C 019/56 Gyroscopes - Turn-sensitive devices with vibrating masses, e.g. tuning fork

G01D 003/028 Measuring arrangements with provision for the special purposes referred to in the subgroups of this group - mitigating undesired influences, e.g. temperature, pressure

G01D 005/241 Mechanical means for transferring the output of a sensing member

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

G01P 015/125 Measuring acceleration - by capacitive pick-up

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 60/367,542 26.03.02 US

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003226083

23 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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