OXALIC ACID AS A CLEANING PRODUCT FOR ALUMINIUM, COPPER AND DIELECTRIC SURFACES

Details for Australian Patent Application No. 2003225178 (hide)

Owner EKC TECHNOLOGY, INC.

Inventors LEE, Shihying; SMALL, Robert, J.

Pub. Number AU-A-2003225178

PCT Number PCT/US03/13019

PCT Pub. Number WO2003/091376

Priority 60/374,819 24.04.02 US

Filing date 24 April 2003

Wipo publication date 10 November 2003

International Classifications

C11D 003/20 Other compounding ingredients of detergent compositions covered in group - containing oxygen

C11D 007/32 Compositions of detergents based essentially on non-surface-active compounds

G03F 007/42 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Stripping or agents therefor

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C11D 007/26 Compositions of detergents based essentially on non-surface-active compounds

C11D 003/30 Other compounding ingredients of detergent compositions covered in group

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 60/374,819 24.04.02 US

18 December 2003 Application Open to Public Inspection

  Published as AU-A-2003225178

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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