APPARATUS AND METHOD FOR HIGH RATE UNIFORM COATING, INCLUDING NON-LINE OF SIGHT

Details for Australian Patent Application No. 2003225170 (hide)

Owner UNIVERSITY OF VIRGINIA PATENT FOUNDATION

Inventors HASS, Derek, D.; QUEHEILLALT, Douglas, T.; WADLEY, Haydn, N., G.

Pub. Number AU-A-2003225170

PCT Number PCT/US03/12920

PCT Pub. Number WO2003/091473

Priority 60/375,552 25.04.02 US

Filing date 25 April 2003

Wipo publication date 10 November 2003

International Classifications

C23C 014/30 Coating by vacuum evaporation, by sputtering or by ion implantation

C23C 014/06 Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the coating material

C23C 014/14 Coating by vacuum evaporation, by sputtering or by ion implantation - Metallic material, boron or silicon

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 60/375,552 25.04.02 US

18 December 2003 Application Open to Public Inspection

  Published as AU-A-2003225170

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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