APPARATUS AND METHOD FOR ENDPOINT DETECTION AND MONITORING FOR CHEMICAL MECHANICAL POLISHING OPERATIONS

Details for Australian Patent Application No. 2003225113 (hide)

Owner MOTOROLA, INC.

Inventors MAUTZ, Karl, E.

Pub. Number AU-A-2003225113

PCT Number PCT/US03/12464

PCT Pub. Number WO2004/002680

Priority 10/180,740 26.06.02 US

Filing date 23 April 2003

Wipo publication date 19 January 2004

International Classifications

B24B 049/12 Measuring - involving optical means

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 10/180,740 26.06.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003225113

17 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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