SYSTEM FOR DEPOSITING A FILM ONTO A SUBSTRATE USING A LOW VAPOR PRESSURE GAS PRECURSOR

Details for Australian Patent Application No. 2003224977 (hide)

Owner MATTSON TECHNOLOGY, INC.

Inventors SELBREDE, Steven, C.; ZUCKER, Martin; VENTURO, Vincent

Pub. Number AU-A-2003224977

PCT Number PCT/US03/11595

PCT Pub. Number WO2003/089682

Priority 60/374,218 19.04.02 US

Filing date 14 April 2003

Wipo publication date 3 November 2003

International Classifications

C23C 016/18 Chemical deposition or plating by decomposition - from metallo-organic compounds

C23C 016/40 Chemical deposition or plating by decomposition - Oxides

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 60/374,218 19.04.02 US

11 December 2003 Application Open to Public Inspection

  Published as AU-A-2003224977

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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