MULTIRATE PROCESSING FOR METROLOGY OF PLASMA RF SOURCE

Details for Australian Patent Application No. 2003224937 (hide)

Owner ENI TECHNOLOGY, INC.

Inventors COUMOU, David, J.; KIRK, Michael, L.

Pub. Number AU-A-2003224937

PCT Number PCT/US03/11266

PCT Pub. Number WO2004/008502

Priority 10/192,196 10.07.02 US

Filing date 14 April 2003

Wipo publication date 2 February 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 10/192,196 10.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003224937

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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